TECHGuru

Wafer temperature measurement equipments are utilized for monitoring the temperature of wafer, during electronics manufacturing. Almost all processes, involved in silicon wafer fabrication and electronics manufacturing, requires effective monitoring and regulation of wafer temperature. The monitoring of temperature is very important in every stage of electronics manufacturing. Changes in temperature, of even 0.1 centigrade can lead to non homogeneity in quality of integrated circuits (ICs) or electronics produced. Additionally, different wafers have different emissivity. The higher the emissivity of a wafer is, the higher amount of energy will be emitted by that wafer.  Accurate wafer emissivity is required to be known for accurate measurement of wafer temperature. Several processes, such as physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD) and high density plasma chemical vapor deposition among others, can be vastly improved by accurat...